| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tool for firing an electronic component with which the release of a gas produced from a binder in firing the electronic component is made smooth, the reaction between the zirconia surface layer and the electronic component can be suppressed, and the electronic component can be efficiently fired since the surface roughness of the zirconia surface layer is maintained at an appropriate level. <P>SOLUTION: The tool for firing the electronic component is composed of a base material, an intermediate layer applied on the surface of the base material, and the zirconia surface layer formed on the intermediate layer, and characterized in that the arithmetic average roughness Ra of the zirconia surface layer is 5-40μm or the ten point average roughness is 30-130μm or the maximum height Ry is 40-200μm, and further the asymmetry degree (distortion) Rsk is -0.5 to 0.5. <P>COPYRIGHT: (C)2004,JPO |
