| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To ensure a stable discharge in a discharge electrode for a wire bonding apparatus. <P>SOLUTION: A discharge electrode 20 is formed in a straight-rod-like shape, and a surface of an electrode core material 24 is coated with an alumina film 26 sealed, and at its tip, an exposure surface 28 in which the electrode core material 24 is exposed is provided at a position deviated from a center axis of a straight rod. The exposure surface 28 faces a tip of a mating wire of discharging to restrict a discharge direction. The alumina film 26 sealed can be formed by a step having roughly classified two stages. A first step is a step of forming an alumina film of a porous structure on a surface of the electrode core material 24, and the alumina film which is about 6μm thick is formed on the surface of the electrode core material by a plasma spray coating method or an anode oxidization method, for example. A second step is a step of sealing the porous structure, and for example, the alumina film is adhered by using a laser PVD method, or sealing is performed with a resin. <P>COPYRIGHT: (C)2004,JPO</p> |
