CARRIER DEVICE FOR PLATE-LIKE OBJECT

摘要

PROBLEM TO BE SOLVED: To provide a plate-like carrier mechanism which can carry even a plate-like object with a cut groove formed in the surface without breakage. SOLUTION: The plate-like carrier device 13 has a suction holding mechanism 20 which sucks and holds a plate-like object and a transfer mechanism 133 which transfers the suction holding mechanism 20 between a first prescribed position and a second prescribed position. The suction holding mechanism 20 has a plate-like object holding member 21, at least three non-contact suction holders 24 arranged on the lower surface of the central region of the plate-like object holding member 21 and a regulating means 22 which is arranged on the lower surface of the outer circumferential region of the plate-like object holding member 21 and regulates the horizontal movement of the plate-like object. COPYRIGHT: (C)2004,JPO