| 摘要 |
PROBLEM TO BE SOLVED: To use a supporting apparatus for inspecting substrates to be inspected whose sizes differ. SOLUTION: In the supporting apparatus, a pair of movable bodies is placed so that it can travel in a direction for approaching or separating from a lower base, a plurality of elevation members for receiving the substrates to be inspected are arranged on the upper base so that they can travel up and down, up/down movement is made by an up/down movement mechanism for elevating the elevation members to pass the substrates, the movable bodies are moved in a direction for approaching or separating each other by the movement mechanism when inspecting the substrates to be inspected whose sizes differ, thus changing to the upper base according to new substrates to be inspected. COPYRIGHT: (C)2004,JPO
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