| 发明名称 |
Removal of contaminants using supercritical processing |
| 摘要 |
A method of cleaning a surface of an object is disclosed. The object is placed onto a support region within a pressure chamber. The pressure chamber is then pressurized. A cleaning process is performed. A series of decompression cycles are performed. The pressure chamber is then vented.
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| 申请公布号 |
US2004072706(A1) |
申请公布日期 |
2004.04.15 |
| 申请号 |
US20030394802 |
申请日期 |
2003.03.21 |
| 申请人 |
ARENA-FOSTER CHANTAL J.;AWTREY ALLAN WENDELL;RYZA NICHOLAS ALAN;SCHILLING PAUL |
发明人 |
ARENA-FOSTER CHANTAL J.;AWTREY ALLAN WENDELL;RYZA NICHOLAS ALAN;SCHILLING PAUL |
| 分类号 |
B08B3/08;B08B7/00;G03F7/42;H01L21/027;H01L21/304;(IPC1-7):C11D1/00 |
主分类号 |
B08B3/08 |
| 代理机构 |
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