| 摘要 |
In this invention, an ultra-precision robotic system yielding either rigid body guidance or large deformation analysis (LDRS, i.e. semi-flexible and flexible robotics) is developed based on the technology of shadow robotic measurement system (shadow system) and robotic real-time stepping convergence and control. With an extreme case of an uncorrelated 6-D revolute joint shadow system, it indicates that the positioning accuracy of such an ultra-precision robotic system will not be in excess of {7.21 nm, 1.68 arc-second}. With the general case of a Puma 560 shadow system, the positioning accuracy also appears not in excess of {7.21 nm, 1.68 arc-second} in most of its working space. By more conservative estimate in practice, the error of positioning accuracy, ERRepsilon[( 50 nm, 2 arc-second), (10<-1 >mum, 3 arc-second)] are expected with current manufacturing and logistical conditions.
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