LASER INTERFEROMETER FOR REPEATABLE MOUNTING ON THE WALL OF A VACUUM CHAMBER

摘要

A laser interferometer is disclosed comprising a housing (10, 40) capable of being substantially repeatably mounted to a wall of an environmental chamber (26, 126), the housing including a laser source (12, 112), a reflector (22, 50, 122, 150) attached to an object located within the environmental chamber, and a light passage provided through the wall of the environmental chamber enabling passage of a laser beam from the laser source to the reflector. At least one beam steerer (56, 58, 156, 158) may be provided for adjusting direction of passage of a laser beam through the light passage. Also disclosed is a column laser interferometer.