| 摘要 |
PROBLEM TO BE SOLVED: To provide a microphone having flexibility, foldability and bendability by forming an MEMS (micro-electromechanical system) transducer structure on a flexible polymeric substrate by using a PECVD (plasma enhanced chemical vapor deposition) process. SOLUTION: A manufacturing method of a flexible MEMS transducer includes a step of forming a sacrificial layer 210 on the flexible substrate; step of laminating a membrane layer 220 on the layer 210 by the PECVD process, and then patterning the layer 220; step of depositing a lower electrode layer 230 on the layer 220, and then patterning the layer 230; step of depositing a piezoelectric polymer on the layer 230, depositing an upper electrode layer 250 thereon, patterning the layer 250, and then patterning the piezoelectric polymer to form an active layer 240; step of forming a first connection pad 272 so as to be connected to the layer 230, and forming a second connection pad 271 so as to be connected to the layer 250; and step of removing the layer 210. COPYRIGHT: (C)2004,JPO
|
