| 摘要 |
PROBLEM TO BE SOLVED: To improve corrosion resistance, travelling property, and durability of a magnetic recording medium having high recording density. SOLUTION: In a magnetic recording medium having at least a magnetic layer 2 consisting of ferromagnetic metal films on a non-magnetic support 1; a protecting layer 3 on the magnetic layer; an underlayer layer between the magnetic layer 2 and the non-magnetic support 1; and a rear side underlayer 5 on a main plane opposite to the magnetic layer forming plane side, the protection layer 3, the underlayer layer 4, and the rear side under layer 5 are formed as at least any of silicon nitride film, silicon oxide film, silicon oxide nitride film, silicon carbide film, and carbon film containing hydrogen by a catalyst chemical vapor phase growth method by applying contact-thermal decomposition to gaseous starting material using a heat catalyst medium, or it is formed as at least any of silicon nitride film, silicon oxide film, silicon oxide nitride film, silicon carbide film, and carbon film containing hydrogen by a plasma CVD method by heating a permanent magnet or an electromagnet part of a cool cathode ion source. COPYRIGHT: (C)2004,JPO
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