| 摘要 |
PROBLEM TO BE SOLVED: To provide a transmission type electron microscope capable of observing an initial growth stage of a thin film formed by sputtering in real time. SOLUTION: The transmission type electron microscope housing 2 has a sputtering gun 10, which emits sputtering particles from a target cathode 16 when generating plasma in the electron microscope housing 2 and deposits the particles on a substrate 3. In the electron microscope housing 2, when the sputtering particles are deposited on the substrate 3, an electronic beam transmitted through the substrate 3 enters, and the initial growth stage of the thin film formed on the substrate 3 can be photographed by a CCD camera 5, and a photographed image is displayed on a display 7 in real time. COPYRIGHT: (C)2004,JPO
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