| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin and light heater whose temperature is easy to control. SOLUTION: A recessed part for embedding therein a thermocouple is provided in a plate-shaped body made of a metal nitride ceramic or a metal carbide ceramic while a heating element formed by sintering metal particles is provided on a surface thereof. The heating element can contain not only the metal particles but a metal oxide, and its surface can be coated with a nickel layer, or the like. COPYRIGHT: (C)2004,JPO
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