发明名称 PROBE UNIT AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a probe unit, for avoiding lowering of the productivity and lowering of accuracy of probe position, even with increase in the number of probes. SOLUTION: The probe unit A is provided with a projection 211, having conductivity on one surface 210, while a probe 400, having a wiring board 200 of which the other surface 220 a land part 221 electrically connected with the projection 211, is provided; a substrate 100 placed facing the other surface 220 of the wiring board 200, where the land part 110 (wiring pattern) is formed; a connecting means 300 for electrically connecting the land part 110 of the substrate 100 and the land part 110 of the wiring board 200; a base part 410 attached on one surface 210 of the wiring board 200; and a needle part 420, which is needle-shaped body extended from the base part and touches the projection 211, when the base part 410 is attached to the wiring board 200, is provided. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004117215(A) 申请公布日期 2004.04.15
申请号 JP20020281803 申请日期 2002.09.26
申请人 JAPAN ELECTRONIC MATERIALS CORP 发明人 UENO TETSUJI
分类号 G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R1/073
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