发明名称 |
Electrically isolated pillars in active devices |
摘要 |
A method of forming an active device is provided. The method includes performing a first patterning operation on a first plurality of layers. This first patterning operation defines a first feature of the active device. Then, a second patterning operation can be performed on at least one layer of the first plurality of layers. This second patterning operation defines a second feature of the active device. Of importance, the first and second patterning operations are performed substantially back-to-back, thereby ensuring that the active device can accurately function.
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申请公布号 |
US2004071034(A1) |
申请公布日期 |
2004.04.15 |
申请号 |
US20030681507 |
申请日期 |
2003.10.07 |
申请人 |
VYVODA MICHAEL A.;BHATIA MANISH;CLEEVES JAMES M.;KNALL N. JOHAN |
发明人 |
VYVODA MICHAEL A.;BHATIA MANISH;CLEEVES JAMES M.;KNALL N. JOHAN |
分类号 |
H01L27/102;(IPC1-7):G11C7/00 |
主分类号 |
H01L27/102 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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