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发明名称
MICRO-ELECTROMECHANICAL SENSOR
摘要
申请公布号
EP1407464(A1)
申请公布日期
2004.04.14
申请号
EP20020768320
申请日期
2002.07.17
申请人
REDWOOD MICROSYSTEMS, INC.
发明人
ZIAS, ART;MAUGER, PHIL;CAHILL, SEAN;NYSTROM, NORM;HENNING, ALBERT, K.
分类号
G01L9/12;H01G5/00;G01L1/14;G01L9/00;H01G4/38;H01G5/06;H01G5/16;H01G5/18;H01G7/00;H01L29/84;(IPC1-7):H01G5/00
主分类号
G01L9/12
代理机构
代理人
主权项
地址
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