| 摘要 |
PURPOSE: A mapping apparatus of an FOUP(Front Opening Unified Pod) opener is provided to be capable of checking the state of loaded wafers from both sides of an FOUP through a pair of arms. CONSTITUTION: A mapping apparatus of an FOUP opener is provided with the first and second arm part(110,210), the first and second rotating shaft(120,220) vertically connected to each rear end portion of the first and second arm part, and a rotation angle measuring part(150) for controlling the angle of the first and second rotating shaft. At this time, the first and second arm part have a light transmitting and receiving part, respectively. The mapping apparatus further includes a light generator(300), a driving motor(130) connected to the lower portion of the first rotating shaft, a main gear(450), and a follower gear(440) for interlocking the main gear.
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