Microgyroscope tunable for translational acceleration

摘要

A sensing gimbal (118) oscillates together with an oscillating gimbal (112), and concurrently moves in a direction perpendicular to the oscillating direction of the oscillating gimbal. A sensing electrode (122) detects the motion of the sensing gimbal. A supporting portion (128) movably secures the sensing electrode such that the electrode can move with the sensing gimbal.