PROBE SHEET, PROBE CARD, SEMICONDUCTOR TEST EQUIPMENT AND SEMICONDUCTOR DEVICE FABRICATION METHOD, CONCERNED WITH TESTING SIMULTANEOUSLY PLURAL SEMICONDUCTOR DEVICES

摘要

PURPOSE: A Probe sheet, a probe card, semiconductor test equipment and a semiconductor device fabrication method are provided to test simultaneously plural semiconductor devices having an electrode structure of a narrow pitch. CONSTITUTION: A probe sheet includes a contact terminal, a wire, and an electrode pad. The contact terminal is in contact with an electrode(3) installed on a wafer(1). A wire is drawn from the contact terminal. The electrode pad is electrically connected to the wire. A pitch of the electrode pads is wider than a pitch of the contact terminals. The contact terminals are arranged according to an array of peripheral electrodes of the semiconductor devices formed on the wafer. The electrode pads are arranged in a grid pattern.