发明名称 Bump with basic metallization and method for manufacturing the basic metallization
摘要 A method for manufacturing a bump on a terminal face (Z1) of a semiconductor substrate (20), in which the terminal face is nucleated to generate a basic metallization through electrolytic coating of the terminal face with zincate, in such a way that zinc particles (24) electrolytically deposited on the terminal face serve as nuclei for an ensuing contact metallization (28) autocatalytically deposited on the basic metallization. In addition to the electrolytic coating with zincate, an electrolytic coating of the terminal face with palladium takes place, in such a way that, in addition to zinc particles (24), palladium particles (25) deposited on the terminal face serve as nuclei for the contact metallization subsequently autocatalytically deposited on the terminal face.
申请公布号 US6720257(B1) 申请公布日期 2004.04.13
申请号 US20010937955 申请日期 2001.09.28
申请人 PAC TECH-PACKAGING TECHNOLOGIES GMBH 发明人 ZAKEL ELKE
分类号 C25D15/02;H01L21/60;(IPC1-7):H01L21/476;H01L21/44 主分类号 C25D15/02
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