Customized span compensation of SOI pressure sensor

摘要

A sensor chip has a piezo-resistive bridge, a first resistor network that can be used for biasing when connected to an external amplifier, a second resistor network that can be used to set gain when connected to the external amplifier, and a leadout resistor that connects an output of the bridge to a common summing point of the two resistor networks. The summing point is connected to the non-inverting input of the external amplifier. The leadout resistor has a predetermined number of squares. A portion of the squares has a light implant and the remaining portion of the squares has a heavy implant. The ratio of the heavy and light implant portions provides customized span compensation of the amplified output for specific operating temperature ranges.