Liquid crystal display on silicon device and its fabrication method

摘要

A liquid crystal display is fabricated on a silicon wafer substrate. A pixel electrode layer is formed on the silicon wafer substrate on which driving circuits and active switching elements are fabricated. The pixel electrode layer has a plurality of pixel electrodes with a pixel electrode gap between every two pixel electrodes. After covering the pixel electrode layer with an insulating layer, a common electrode layer is formed. The common electrode layer has a plurality of major common electrodes each formed above a pixel electrode gap. At least one minor common electrode may be interposed between every two major common electrodes. Alignment films are printed above the common electrode layer and on the inner side of an upper glass substrate. A liquid crystal layer filled with negative type liquid crystals is then formed between the silicon wafer substrate and the upper glass substrate.