发明名称 Method for manufacturing TFT array substrate of liquid crystal display device
摘要 A semiconductor layer protruding beside a source line is removed in order to increase aperture ratio, decrease resistance of the source line and prevent source-common capacitance from increasing. When a part of a passivation film is removed to form a contact hole, the passivation film on the source line, the passivation film beside the source line and a gate insulating layer beside the source line are simultaneously removed. A portion protruding beside the source line is removed from thus exposed semiconductor layer using a resist pattern for removing the part of the passivation film and/or the source line as a mask.
申请公布号 US6720199(B2) 申请公布日期 2004.04.13
申请号 US20020088943 申请日期 2002.03.21
申请人 ADVANCED DISPLAY INC. 发明人 MATSUBARA RYOUTA
分类号 G02F1/136;G02F1/1362;G02F1/1368;G09F9/00;G09F9/30;H01L21/336;H01L29/786;(IPC1-7):H01L21/00 主分类号 G02F1/136
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