WAFER LIFT APPARATUS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: A wafer lift apparatus of a semiconductor manufacturing equipment is provided to be capable of preventing breakage of a pusher lifter due to friction between the pusher lifter and a stopper lifter. CONSTITUTION: A wafer lift apparatus includes a pusher lifter(30) and a stopper lifter(32). The pusher lifter(30) further includes a bar(30b) and a circular cylinder(30a). The stopper lifter(32) further includes a head(32b) and a column(32a). The head(32b) is injected in the circular cylinder(30a). At the time, the lower part of the head(32b) connected to the bottom of the circular cylinder(30a) has a flat shape.