发明名称 |
Single-side microelectromechanical capacitive accelerometer and method of making same |
摘要 |
A high sensitivity, Z-axis, capacitive microaccelerometer having stiff sense/feedback electrodes and a method of its manufacture on a single-side of a semiconductor wafer are provided. The microaccelerometer is manufactured out of a single silicon wafer and has a silicon-wafer-thick proof mass, small and controllable damping, large capacitance variation and can be operated in a force-rebalanced control loop. One of the electrodes moves with the proof mass relative to the other electrode which is fixed. The multiple, stiffened electrodes have embedded therein damping holes to facilitate force-rebalanced operation of the device and to control the damping factor. Using the whole silicon wafer to form the thick large proof mass and using thin sacrificial layers to form narrow uniform capacitor air gaps over large areas provide large-capacitance sensitivity. The manufacturing process is simple and thus results in low cost and high yield manufacturing.
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申请公布号 |
US6718605(B2) |
申请公布日期 |
2004.04.13 |
申请号 |
US20010885953 |
申请日期 |
2001.06.21 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF MICHIGAN |
发明人 |
YAZDI NAVID;NAJAFI KHALIL;SALIAN ARVIND |
分类号 |
G01P15/08;G01P15/125;G01P15/13;(IPC1-7):H01G7/00 |
主分类号 |
G01P15/08 |
代理机构 |
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主权项 |
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地址 |
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