发明名称 Semiconductor device having align key for defining active region and method for manufacturing the same
摘要 A semiconductor device having an align key, which is simultaneously formed by implanting ions before defining an active region, for a precise alignment with a preformed well on a semiconductor substrate when forming a photoresist pattern for defining the active region, and a method for manufacturing the same are provided The semiconductor device includes the align key formed of a first recess having a first depth from a surface of a semiconductor substrate in a scribe line region of the semiconductor substrate, and a second step portion formed by a second recess having a second depth, which is less than or equal to the first depth, from the surface of the semiconductor substrate in a well region of the semiconductor substrate.
申请公布号 US6720667(B2) 申请公布日期 2004.04.13
申请号 US20020307806 申请日期 2002.12.02
申请人 SAMSUNG ELECTRONICS CO., LTD 发明人 KIM MYOUNG-SOO
分类号 G03F7/20;G02F1/136;H01L21/027;H01L21/761;H01L21/8234;H01L23/544;H01L31/062;H01L31/113;(IPC1-7):H01L23/544 主分类号 G03F7/20
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