Methods using dry powder deposition apparatuses

摘要

Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising:an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing;a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; andan optical detection device for quantifying the amount of grains deposited.