| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow controller which can reduce inclusion of foreign matter due to mixing in hydraulic fluid, and prevent generation of unstable fluid flow control. SOLUTION: A negative pressure sensitive valve spool 9 is fitted in a union 5 so as to be capable of sliding. When negative pressure increases, the spool 9 moves to spring 10 side against the elastic force of the spring 10. The spool 9 is formed with a through hole 11 and a throttling passage 12. A pressure introducing passage 13 is formed at the union 5, and the pressure introducing passage 13 is connected to a communication passage 14. The hydraulic fluid pressure which is introduced from the through hole 11 through the throttling passage 12 is introduced into the spring chamber 32 of a fluid flow regulating valve 15 through the pressure introduction passage 13 and the communication passage 14. A pressure delivering passage 16 is formed at the union 5, and the pressure delivering passage 16 communicates with a delivering passage 17. A cut groove 18 is notched at the outer-periphery groove 9a of the spool 9 where the throttling passage 12 is opened to form a variable orifice 19. |
