| 摘要 |
PROBLEM TO BE SOLVED: To perform necessary treatment precisely for a specified position of a surface to be treated by operating a one-side stationary controlling element and the other-side stationary controlling element. SOLUTION: The other-side brim part 1b of a substrate 1 to be treated supported by a board supporting part 12 can be fixed by being pressed by a biting and holding part 37 in the other-side stationary controlling element. At this time, the one-side stationary controlling element 22 for applying a pressing force to the one-side brim part 1a is operated. And a one-side air route R1 is directly connected to an air-supply-side passage 33 through first and second switching valves 31, 32, and the other-side air route R2 is directly connected to an exhaust-side passage 34 through the second switching valve 32. As a result, an operating lever 27 moves forwards, and a biting and holding part 23 touches and presses the one-side brim part 1a of the substrate 1 to be treated and supports this. The substrate 1 to be treated fixed in this way, is supported surely through the one-side brim part 1a and the other-side brim part 1b, and it becomes possible to perform necessary treated precisely for a specified position of the surface to be treated. |
