METHOD AND APPARATUS FOR MANUFACTURING IMAGE DISPLAY APPARATUS BY MOVING FIRST AND SECOND SUBSTRATES SEQUENTIALLY THROUGH BAKING PROCESSING CHAMBER, FIRST GETTER PROCESSING CHAMBER, ELECTRON BEAM CLEANING CHAMBER, SECOND GETTER PROCESSING CHAMBER AND SEALING CHAMBER

摘要

PURPOSE: A method and an apparatus are provided to achieve improved manufacturing efficiency by reducing vacuum evacuation time and allowing for ease of high vacuumization. CONSTITUTION: A method comprises a step of preparing, under a vacuum atmosphere, a first substrate equipped with a phosphor excitation unit and a second substrate equipped with a phosphor for emitting light by the phosphor excitation unit; a step of transferring one or both of first and second substrates to a getter processing chamber, and getter processing one or both of first and second substrates; and a step of transferring first and second substrate to a sealing processing chamber, and heat sealing the substrates. An apparatus comprises a transfer unit for transferring first and second substrates; a first vacuum chamber for accommodating one or both of first and second substrates transferred by the transfer unit; a getter activation unit including a getter precursor arranged in the first vacuum chamber and a getter activation member for activating the getter precursor; a second vacuum chamber for accommodating first and second substrates transferred by the transfer unit; a substrate arrangement unit for arranging first and second substrates in the second vacuum chamber in such a manner that the substrates are opposed with each other; and a sealing unit for heat sealing the substrates in the second vacuum chamber.