CERAMIC CONNECTION BODY, METHOD OF CONNECTING THE CERAMIC BODIES, AND CERAMIC STRUCTURAL BODY

摘要

It is to provide a ceramic joint body and a ceramic structural body effectively used in semiconductor production and inspection devices including a hot plate or the like, and proposes a ceramic joint body by joining ceramic bodies to each other, in which coarse pores having an average diameter larger than an average particle size of ceramic particles constituting the ceramic body and a size of not more than 2000 mu m are formed in a joining interface between the one ceramic body and the other ceramic body as well as a method of joining ceramics to each other.