摘要 |
PROBLEM TO BE SOLVED: To carry out evaluation of a scanning optical system by realizing simplification of processing at the latter stage by reducing a transferring rate of data and simulation printing environment by optional image data by producing and outputting an image obtained by deviating and superposing the two-dimensional image continuously obtained by an amount corresponding to sub-scanning movement amount. SOLUTION: The measurement evaluation method measures and evaluates a scanning optical unit 2. A plurality of images which laser beam forms at a photo-sensitive body image position R through the scanning optical unit 2 are continuously obtained as image data in synchronous to the scanning of the laser beam by a detection part 11. The position of the image is deviated to the image by a plurality of image data continuously obtained by the amount corresponding to the movement amount in the sub-scanning direction at the image formation and a sum between the images is calculated. Thereby, beam profile of the exposure state formed by the scanning optical system is measured and evaluated. COPYRIGHT: (C)2004,JPO
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