CHEMICAL CONVERSION SYSTEM, CHEMICAL CONVERSION METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR WAFER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce the variation of layers formed on wafers through chemical conversion among the wafers. SOLUTION: The chemical conversion system 100 in an ideal embodiment of this invention is provided with a computer 101 which decides the condition for performing chemical conversion on a silicon wafer 11 based on the physical property of the wafer 11 and a single wafer chemical conversion treating device 105 which performs chemical conversion treatment on the wafer 11 in accordance with the conditions decided by means of the computer 101. COPYRIGHT: (C)2004,JPO