| 摘要 |
PROBLEM TO BE SOLVED: To realize neighboring field photo CVD (Chemical vapor Deposition) in which the wavelength conditions of light supplied from a light source is relaxed. SOLUTION: In the photochemical vapor deposition system, neighboring field light is applied, so that a gas present in the vicinity of a substrate is composed, and is deposited on the substrate. In this case, light having a wavelength equal to or above that of light equivalent to the dissociation energy of the gas is outputted via an acute part obtained by making optical fiber acute to generate neighboring field light. The gas is dissociated through a multistage transition stage to obtain a decomposed product, and the decomposed product is deposited on the substrate. Thus, the wavelength conditions of the light supplied from the light source can be relaxed. COPYRIGHT: (C)2004,JPO
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