| 发明名称 |
REFRACTIVE PROJECTION OBJECTIVE |
| 摘要 |
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8 <D1/D2<1.1. |
| 申请公布号 |
WO03075049(A3) |
申请公布日期 |
2004.04.08 |
| 申请号 |
WO2003US06592 |
申请日期 |
2003.03.03 |
| 申请人 |
CARL ZEISS SMT AG;HUDYMA, RUSSELL;ROSTALSKI, HANS-JUERGEN;ULRICH, WILHELM;FREIMANN, ROLF |
发明人 |
HUDYMA, RUSSELL;ROSTALSKI, HANS-JUERGEN;ULRICH, WILHELM;FREIMANN, ROLF |
| 分类号 |
G02B13/24;G02B13/14;G02B13/18;G03F7/20;H01L21/027 |
主分类号 |
G02B13/24 |
| 代理机构 |
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代理人 |
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