| 摘要 |
PROBLEM TO BE SOLVED: To improve the structure of an electric connection for sealing the vibration space of a mirror and driving the mirror as to an optical scanner in which the mirror is reciprocally vibrated around a twist beam as an axis of torsional rotation. SOLUTION: The vibration space of the mirror 33 is airtightly sealed by joining a cover substrate 31 made of a transparent insulating material and a base substrate 35 made of an insulating material to respective surfaces of a mirror substrate 34 which is made of a conductive material in which a frame 39, the twist beam 32, and the mirror 33 are formed in one body. A through electrode 36 provided to the base substrate 35 is in contact with a specified position of the frame 39. The mirror 33 is driven with static electricity and then a driving voltage for that can be applied from outside through the through electrode 36. COPYRIGHT: (C)2004,JPO
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