OPTICAL SWITCH UTILIZING MULTI LAYER STRUCTURE WAFER

摘要

Disclosed is an optical switch utilizing a multi layer structure wafer by comprising: optical waveguides for optical communication; a structural layer provided with fixing parts for fixing the waveguides, a mirror for changing an optical communication direction between the input port and the output port, an actuator for driving the mirror; a sacrificial layer arranged below the structural layer and etched to have a small area relative to the structural layer, for supporting the structural layer apart therefrom; and a supporting layer arranged below the sacrificial layer, for supporting the sacrificial layer and the structural layer. The structural layer is etched to define the fixing part, the mirror and the actuator, and the corresponding input port and output port are inclined with an angle of 3 degrees to 20 degrees.