发明名称 |
USER INTERFACE FOR QUANTIFYING WAFER NON-UNIFORMITIES AND GRAPHICALLY EXPLORE SIGNIFICANCE |
摘要 |
A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected regions of the wafer, and displaying results of the analysis. |
申请公布号 |
WO2004030083(A2) |
申请公布日期 |
2004.04.08 |
申请号 |
WO2003US30456 |
申请日期 |
2003.09.24 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
LUQUE, JORGE;BAILEY, III, ANDREW, D.;WILCOXSON, MARK |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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