SEMICONDUCTOR MULTIAXIAL ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor multiaxial acceleration sensor capable of restraining the deterioration of a temperature characteristic caused by a wiring pattern electrically connected to a resistor installed in a flexural part.

SOLUTION: A sensor body 1 is provided with a weight part 12 disposed inside an oblong frame-like frame part 11. The weight part 12 has: a rectangular solid-like main weight part 12a supported by the frame part 11 by interlaying the four flexural parts 13; and four rectangular solid-like additional weight parts 12b connected continuously and integrally with the respective four corners of the weight part 12a. The sensor body 1 includes two kinds of wiring patterns such as diffusion layer wiring patterns 15 and metal wiring patterns 17 electrically connected to piezo-resistance R1x-R4x, R1y-R4y and R1z-R4z of resistors, and at least parts thereof formed in the respective flexural parts 13 are formed of the wiring patterns 15. Each wiring pattern 17 is electrically connected to the corresponding wiring pattern 15 at a contact part 20.

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