LOW-REFRACTIVE INDEX THIN FILM, MANUFACTURING METHOD THEREFOR, AND ANTI-REFLECTION FILM

摘要

PROBLEM TO BE SOLVED: To provide a low-refractive index thin film capable of structurally changing a refractive index without changing materials and a manufacturing method therefor and to provide an anti-reflection film provided with the low-refractive index thin film. SOLUTION: A laminated film having charged layers having positive electric charge and charged layers having negative electric charge, alternately laminated is subjected to acid treatment or alkali treatment to form gaps in the laminated film, thus the low-refractive index thin film is obtained. A high-refractive index thin film is formed on a base material, and the low-refractive index thin film is formed on the high-refractive index thin film to obtain the anti-reflection film. COPYRIGHT: (C)2004,JPO