摘要 |
<p><P>PROBLEM TO BE SOLVED: To deposit a carbon film on a vessel through plasma coating without disturbing the structure of the carbon film. <P>SOLUTION: A vessel (C) formed in a blow molding apparatus (10) is conveyed by a conveyor (100) to a carbon dioxide-injecting apparatus (20). Among several nozzles (23) established on a lower surface of a rotating drum (21), the carbon dioxide-injecting apparatus opens a nozzle located at a predetermined position and ejects carbon dioxide from it to fill carbon dioxide into the vessel passing beneath the opened nozzle 23. The vessel filled with carbon dioxide is conveyed by the conveyor to a plasma coating apparatus (30) and subjected to a carbon film plasma coating. Since the vessel contains no air when the plasma coating is started, the structure of the carbon film is not disturbed by reaction of nitrogen and oxygen atoms during plasma coating. <P>COPYRIGHT: (C)2004,JPO</p> |