TEMPERATURE MEASURING EQUIPMENT FOR WAFER HOLDER AND WAFER HOLDER

摘要

PROBLEM TO BE SOLVED: To provide temperature measuring equipment for a wafer holder having an excellent temperature measurement accuracy in which the entirety of the wafer holder is not required to be replaced when a temperature measuring element is damaged, and to provide a wafer holder employing it. SOLUTION: A temperature measuring element 1 is inserted into a bottomed tubular body 11 and at least the outer surface of the bottomed parts 11a is touched to the back surface opposite to the heating surface of a wafer holder 3 or a recess made in the back surface. A tubular part 11b on the other end side of the bottomed tubular body 11 and a reaction container 4 are sealed hermetically through an O-ring 5. Preferably, the contact area between the bottomed tubular body 11 and the wafer holder 3 is not smaller than 10 mm2, parallelism of the contact surfaces is 100μm or less, or the surface roughness Ra of the contact surface is 5μm or less. COPYRIGHT: (C)2004,JPO