MICROFLUIDIC DRIVER AND ITS MANUFACTURING PROCESS, ELECTROSTATIC HEAD UNIT AND ITS MANUFACTURING PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a microfluidic driver in which a high fluidic driving force can be obtained while enhancing productivity by realizing a high density driving section, and to provide an electrostatic head comprising it. SOLUTION: The microfluidic driver comprises a diaphragm 12 for imparting a pressure variation to fluid, independent diaphragm side electrode 11 and substrate side electrode 7 for driving the diaphragm 12, and a strut 13 for forming a space 9 between the diaphragm side electrode 11 and the substrate side electrode 7. COPYRIGHT: (C)2004,JPO