| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film coated tool that has an amorphous nano crystal phase in a hard film having oxidation resistance, achieves high hardness of the film, and has high abrasive wear resistance and oxidation wear resistance, for responding to drying or speed increase of cutting of high hardness steel. SOLUTION: A substrate surface of the hard film coated tool is coated with one or more hard layers composed of metal component mainly containing Cr, Al and Si and one or more elements selected from C, N, O and B, and a crystal structure of the hard film is fcc. In its manufacturing method, covering temperature is 550°C or more, and applied bias voltage is -50V or higher. COPYRIGHT: (C)2004,JPO
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