| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent pressure drop in an alternately gas mixing machine, and to prevent any oscillation of an opening/closing element when inert gas is alternately fed. <P>SOLUTION: An alternately gas mixing machine comprises a body (210) having one gas exhaust port (213) formed in an outer circumferential surface on opposite sides of first and second gas inlets (211 and 212) with the inner side thereof hollow, an opening/closing element (220) to alternately discharge inert gas passed respectively into first and second gas chambers (261 and 262) through the first and second gas inlets (211 and 212) by the straight reciprocating motion from the gas exhaust port (213), a plurality of plunger guides (240) to fix a stopper (230) to pack both ends of the opening/closing element (220), and first and second solenoids (251 and 252) with coils (251b and 252b) wound in a direction opposite to each other around bobbins (251a and 252a) so as to provide the magnetic force to the opening/closing element (220) in a straight-reciprocating manner. <P>COPYRIGHT: (C)2004,JPO</p> |
