| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an interferometer capable of measuring an aspheric shape highly accurately. <P>SOLUTION: This interferometer for measuring the face shape of a measuring object having the aspheric shape has a wavefront conversion optical system having a plurality of spherical lenses. The wavefront conversion optical system is characterized by adopting a first arrangement capable of converting parallel light into an approximately perfect spherical wave and a second arrangement capable of converting the parallel light into a wave front approximately coincident with the aspheric shape. <P>COPYRIGHT: (C)2004,JPO |
