| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To form patterns of various sizes with a single chromeless mask. <P>SOLUTION: A plurality of grooves 2 are arranged parallelly on a mask substrate 1 so as to make areas where light intensity 3 drops come into contact with each other in one groove 2. <P>COPYRIGHT: (C)2004,JPO</p> |
