发明名称 METHOD AND APPARATUS FOR GENERATING AND MAINTAINING A PLASMA
摘要 The present invention is related to a method and apparatus for generating and maintaining a plasma by a Dielectric Barrier Discharge technique, in the space between two electrodes, whereby an alternating voltage is applied between said two electrodes, said voltage having such a profile so that one electrode is treated to a lesser degree by said plasma than the other electrode.
申请公布号 AU2003266866(A1) 申请公布日期 2004.04.08
申请号 AU20030266866 申请日期 2003.09.19
申请人 VLAAMSE INSTELLING VOOR TECHNOLOGISCH ONDERZOEK (VITO) 发明人 SABINE PAULUSSEN;OLIVIER GOOSSENS;DIRK VANGENEUGDEN
分类号 H01J37/32;H05H1/24 主分类号 H01J37/32
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