| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a linewidth measuring method which can measure linewidth accurately even if the texture level is not stabilized, and to provide a record medium recording a program. <P>SOLUTION: The linewidth measuring method is provided with a first step of reading a line image by scanning an optical reading means with linear reflectivity in the linewidth direction, a second step of determining a maximum value and a minimum value of an integrated value of read data, and a third step of determining a threshold by a specified function. <P>COPYRIGHT: (C)2004,JPO |
