| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated polyester film for a dry-film photoresist, which accomplishes a high resolution of a resist, which prevents the occurrence of a traveling failure such as a crease and flapping, and to which easiness of sliding is imparted. <P>SOLUTION: In this laminated polyester film which is composed of at least two layers, a haze with a wavelength of 365 nm is 8% or less. A relationship between a mean particle diameter r (μm) of an inert particle, which is contained in at least one outermost layer (referred to as an easy-to-slid layer A) of the laminated polyester film, and a lamination thickness t (μm) of the layer A satisfies expression (1): 0.5<t/r≤5. <P>COPYRIGHT: (C)2004,JPO |
