OPTICAL INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical inspection device whose monitoring range is wide by adjusting the direction of the visual line of a camera. SOLUTION: The optical inspection device is equipped with a holder 38 which has a water cooling jacket space 42 at its edge part where a video camera 1 is provided and the outer side surface of the edge part of which is formed to be a projected spherical surface; a mounting base 40 which surrounds an aperture bored on the wall plate 53 of a high-temperature chamber and on which an annular recessed curved surface on which the edge part of the holder 38 slidably abuts from the outer side of the high-temperature chamber is formed; and a pressing plate 56 externally fit to the holder 38 and fit on the mounting base 40. By displacing the posture of the holder 38 by a manual operation, the direction of the visual line of the camera 1 is adjusted. COPYRIGHT: (C)2004,JPO