| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic attraction apparatus in which heat conduction with an object to be treated is prevented from being lowered and the cost of parts can be reduced. SOLUTION: The electrostatic adsorption apparatus is provided with an electrode 5 which is connected to an external variable DC power source 9 via a lead wire 8, and a protecting film 6 which covers the electrode 5 and is composed of a dielectric body, and the protecting film 6 is formed on a surface of the electrode 5 except for the surface to place the object 2 to be treated. The dielectric body to be used for the protecting film 6 is composed of quartz or a polyimide resin, ceramic (e.g., alumina (Al<SB>2</SB>O<SB>3</SB>), aluminum nitride (AlN), zinc oxide (Zn<SB>2</SB>O<SB>3</SB>) and boron nitride (BN, PBN)) and the like. COPYRIGHT: (C)2004,JPO |
